The Zeiss GeminiSEM-450 is an advanced high-resolution analytical Scanning electron microscope with a spatial resolution up to 1.0 nm. Gemini 2 optics enables fast, high resolution imaging and analytics by switching seamlessly between low and high current / kV work.
GemiminSEM-450 allows for imaging and characterize materials comprehensively by using multiple detectors in parallel, including SE, BSE, in-lens SE and ESB detectors. The instrument is equipped with a large EDX (energy dispersive X-ray) detector and CMOS type of EBSD detector for the investigation of chemical composition and crystal orientation with high-speed automated mappings. The instrument also equipped with a STEM (scanning transmission electron microscopy) detector for thin foil analysis.
The microscope operation system is coupled with Zeiss ZEN software which facilitates light -EM in-volume correlation.
A tensile/compressing stage with 5kN-tensile module is available for in-situ mechanical testing compatible with EBSD analysis at room temperature.
Instrument data:
- Shottky Field Emission Gun
- Acceleration voltage: 0.1 - 30 kV
- Beam current: 10 pA - 300 nA
- Resolution: 1.0 nm at 1 kV
- Doublet In-lens SE and in-lens EsB detectors
- 6 sector annular Selective Backscatter Detector (BSD1)
- 4-channel-aSTEM detector
- Oxford Instrument Ultim Max 100mm2 detector with AZtecLive Automated EDS-pack
- Oxford Instrument CMOS Symmetry detector with integrated AZtecHKL Advanced EBSD-pack
- Charge Compensation system
- K&W Tensile/Compressing stage with 5kN-tensile module EBSD compatible
- Operating software: SmartSEM plugged into Zeiss ZEN Core software
- Store resolution: up to 32000 x 24000 pixel