The LEO 1550 is a high-performance SEM with field emission gun (FEGSEM), dedicated by high vacuum and high imaging resolution down to 1 nm. The unique Gemini column technology combined with an in-lens secondary electron detector make the microscope ideal for imaging materials at high magnifications and low kV. The LEO 1550 instrument equipped with a retractable BSE detector, EDX (energy dispersive X-ray) for chemical analysis, and EBSD (electron backscattered diffraction) for crystalline orientation analysis.
Instrument data:
- Shottky FE source (field emission gun) with high current mode
- Acceleration voltage: 0.2 - 30 kV
- Probe current: 4 pA - 10 nA
- Spatial resolution: 20 kV: 1 nm; 1 kV: 3 nm
- Oxford Instrument 20 mm2 X-Max detector (EDS)
- Oxford Instrument HKL Nordlys Electron Backscattered Diffraction (EBSD) system
- Centaurus Backscattered Electrons (BSE) detector