Picture of PHI5500 Multi-technique XPS
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X-ray photoelectron spectroscopy (XPS), or electron spectroscopy for chemical analysis (ESCA), is a material characterisation technique that provides elemental and chemical information for solid sample with the analysing depth in few atomic layers. XPS is an instrument in surface science for thin films, coatings and native oxide layers study. Wide range of materials like metals, semiconductors, ceramics, polymers and composite materials, regardless of electrical conductivity, can be analysed. A brief technical description about the XPS process include X-ray irradiation, photoelectron excitement and kinetic energy detection of the emitted electron. Characteristic energies of the excited photoelectrons from different electron shells of elements are presented as peaks at different positions along the XPS binding energy spectrum, with which the chemical composition and the chemical state of the individual element can be determined.

This XPS instrument is hosted by the Department of Industrial and Materials Science with the spectrometric and depth profiling functions.

For the details, please contact Dr. Eric P.L. Tam (tel: 031-772-1253; Email: eric.tam@chalmers.se), or Professor Emmy Yu Cao (Tel.: 031-772-1252; Email: yu.cao@chalmers.se) at the Department of Industrial and Material Science.

Tool name:
PHI5500 Multi-technique XPS
Category:
Surface Analysis
Manufacturer:
Perkin-Elmer PHI
Model:
PHI5500 Multi-technique ESCA

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